Microelectronics Research Center, The University of Texas at Austin, Austin, Texas 78758, United States.
ACS Appl Mater Interfaces. 2020 Jul 29;12(30):33926-33933. doi: 10.1021/acsami.0c08802. Epub 2020 Jul 20.
2D materials with low-temperature processing hold promise for electronic devices that augment conventional silicon technology. To meet this promise, devices should have capabilities not easily achieved with silicon technology, including planar fully-depleted silicon-on-insulator with substrate body-bias, or vertical finFETs with no body-bias capability. In this work, we fabricate and characterize a device [a double-gate MoS field-effect transistor (FET) with hexagonal boron nitride (h-BN) gate dielectrics and a multi-layer graphene floating gate (FG)] in multiple operating conditions to demonstrate logic, memory, and synaptic applications; a range of h-BN thicknesses is investigated for charge retention in the FG. In particular, we demonstrate this device as a (i) logic FET with adjustable by charges stored in the FG, (ii) digital flash memory with lower pass-through voltage to enable improved reliability, and (iii) synaptic device with decoupling of tunneling and gate dielectrics to achieve a symmetric program/erase conductance change. Overall, this versatile device, compatible to back-end-of-line integration, could readily augment silicon technology.
二维材料具有低温处理的优势,有望应用于增强传统硅技术的电子设备。为了实现这一承诺,设备应具备硅技术不易实现的功能,包括具有衬底体偏置的平面全耗尽型绝缘体上硅和具有无体偏置能力的垂直鳍式场效应晶体管(FinFET)。在这项工作中,我们在多种工作条件下制造和表征了一种器件(一种具有六方氮化硼(h-BN)栅介质和多层石墨烯浮栅(FG)的双栅 MoS 场效应晶体管(FET)),以展示逻辑、存储和突触应用;我们研究了不同的 h-BN 厚度,以研究 FG 中的电荷保持情况。特别是,我们将该器件展示为(i)具有可调 的逻辑 FET,通过 FG 中存储的电荷来实现,(ii)具有更低的直通电压的数字闪存,以提高可靠性,以及(iii)具有隧穿和栅介质解耦的突触器件,以实现对称的编程/擦除电导变化。总的来说,这种多功能器件与后端集成兼容,可轻松增强硅技术。