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在硅上生长的量子点激光器实现1.55微米电泵浦连续波激光发射

1.55 µm electrically pumped continuous wave lasing of quantum dash lasers grown on silicon.

作者信息

Xue Ying, Luo Wei, Zhu Si, Lin Liying, Shi Bei, Lau Kei May

出版信息

Opt Express. 2020 Jun 8;28(12):18172-18179. doi: 10.1364/OE.392120.

Abstract

Realization of fully integrated silicon photonics has been handicapped by the lack of a reliable and efficient III-V light source on Si. Specifically, electrically pumped continuous wave (CW) lasing and operation sustainable at high temperatures are critical for practical applications. Here, we present the first electrically pumped room temperature (RT) CW lasing results of 1.55 μm quantum dash (QDash) lasers directly grown on patterned on-axis (001) Si using metal organic chemical vapor deposition (MOCVD). Adopting a dash-in-well structure as the active medium, the growth of QDash was optimized on an InP on Si template. Incorporating the advantages of the optimized material growth and device fabrication, good laser performance including a low threshold current of 50 mA, a threshold current density of 1.3 kA/cm and operation at elevated temperature up to 59 °C in CW mode was achieved. Comparison of lasers grown on Si and native InP substrates in the same growth run was made. Based on the laser characteristics measured at room temperature and elevated temperatures, the QDash quality on the two substrates is comparable. These results suggest that MOCVD is a viable technique for lasers on Si growth and represent an advance towards silicon-based photonic-electronic integration and manufacturing.

摘要

由于缺乏在硅上可靠且高效的III-V族光源,完全集成的硅光子学的实现受到了阻碍。具体而言,电泵浦连续波(CW)激光发射以及在高温下可持续运行对于实际应用至关重要。在此,我们展示了使用金属有机化学气相沉积(MOCVD)在图案化的轴向(001)硅上直接生长的1.55μm量子点(QDash)激光器的首个电泵浦室温(RT)连续波激光发射结果。采用阱中量子点结构作为有源介质,在硅上的磷化铟模板上对量子点的生长进行了优化。结合优化的材料生长和器件制造的优势,实现了良好的激光性能,包括50 mA的低阈值电流、1.3 kA/cm²的阈值电流密度以及在高达59°C的升高温度下以连续波模式运行。对在相同生长过程中在硅和原生磷化铟衬底上生长的激光器进行了比较。基于在室温及升高温度下测量的激光特性,两种衬底上的量子点质量相当。这些结果表明,MOCVD是用于在硅上生长激光器的可行技术,代表了朝着基于硅的光子 - 电子集成与制造迈出的一步。

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