Department of Physics, College of Science, King Faisal University, P. O. Box 400, Al-Ahsa, 31982, Kingdom of Saudi Arabia.
Sci Rep. 2020 Nov 26;10(1):20663. doi: 10.1038/s41598-020-77705-8.
The need for a fast and robust method to characterize nanostructure thickness is growing due to the tremendous number of experiments and their associated applications. By automatically analyzing the microscopic image texture of MoS and WS, it was possible to distinguish monolayer from few-layer nanostructures with high accuracy for both materials. Three methods of texture analysis (TA) were used: grey level histogram (GLH), grey levels co-occurrence matrix (GLCOM), and run-length matrix (RLM), which correspond to first, second, and higher-order statistical methods, respectively. The best discriminating features were automatically selected using the Fisher coefficient, for each method, and used as a base for classification. Two classifiers were used: artificial neural networks (ANN), and linear discriminant analysis (LDA). RLM with ANN was found to give high classification accuracy, which was 89% and 95% for MoS and WS, respectively. The result of this work suggests that RLM, as a higher-order TA method, associated with an ANN classifier has a better ability to quantify and characterize the microscopic structure of nanolayers, and, therefore, categorize thickness to the proper class.
由于实验数量众多及其相关应用,需要一种快速而稳健的方法来描述纳米结构的厚度。通过自动分析 MoS 和 WS 的微观图像纹理,可以高精度地区分两种材料的单层和少数层纳米结构。使用了三种纹理分析 (TA) 方法:灰度直方图 (GLH)、灰度共生矩阵 (GLCOM) 和行程长度矩阵 (RLM),分别对应于一阶、二阶和更高阶统计方法。使用 Fisher 系数自动选择最佳判别特征,作为分类的基础。使用了两种分类器:人工神经网络 (ANN) 和线性判别分析 (LDA)。发现 RLM 与 ANN 结合的分类精度很高,对于 MoS 和 WS 分别为 89%和 95%。这项工作的结果表明,作为一种高阶 TA 方法,与 ANN 分类器结合的 RLM 具有更好的量化和描述纳米层微观结构的能力,因此能够将厚度分类到适当的类别。