Takahashi Katsuyuki, Saito Ryo, Onodera Taichiro, Takaki Koichi, Kitai Hidenori, Sakamoto Kunihiro
Faculty of Science and Engineering, Iwate University, Ueda 4-3-5, Morioka, Iwate 020-8551, Japan.
Advanced Power Electronics Research Center, National Institute of Advanced Industrial Science and Technology, Umezono 1-1-1, Tsukuba, Ibaraki 308-8568, Japan.
Rev Sci Instrum. 2021 Jun 1;92(6):064706. doi: 10.1063/5.0039041.
A compact inductive energy storage (IES) pulsed-power generator that is driven by a novel 13 kV silicon carbide (SiC)-MOSFET is developed and molded into a compact modified TO-268. In this article, the switching characteristics required for IES pulsed-power generator development are evaluated. The maximum slew rates at MOSFET turn-on and turn-off are 157 and 129 kV/μs, respectively, at an input voltage of 10 kV. The maximum current flow from the drain to the source terminal is limited to 128 A during short-circuit switching. The on-resistance between the drain and source terminals increases during the SiC-MOSFET's on state. It increases with the voltage and its minimum value is 1.07 Ω. These characteristics show that the device is suitable for use as an opening switch because of its low on-resistance and rapid large-current cutoff at high operating voltages. The characteristics of an IES pulsed-power generator composed of a SiC-MOSFET, a capacitor, and a pulsed transformer with a turn ratio of 5:15 are also evaluated. The output voltage peak and full width at half maximum reach 31.4 kV and 55 ns, respectively, at a charging voltage of 1100 V. The maximum energy transfer efficiency is 50.2% of the input energy with a load resistance of 2.5 kΩ. The results show that the MOSFET has excellent potential to support the development of a compact plasma generation system that offers better performance pulsed-power generators driven by semiconductor devices.
一种由新型13 kV碳化硅(SiC)-MOSFET驱动的紧凑型感应储能(IES)脉冲功率发生器被开发出来,并封装成紧凑型改进型TO-268。在本文中,对IES脉冲功率发生器开发所需的开关特性进行了评估。在输入电压为10 kV时,MOSFET导通和关断时的最大转换速率分别为157 kV/μs和129 kV/μs。在短路开关期间,从漏极到源极端子的最大电流限制为128 A。在SiC-MOSFET的导通状态下,漏极和源极端子之间的导通电阻会增加。它随电压增加,其最小值为1.07Ω。这些特性表明,该器件因其低导通电阻和在高工作电压下快速切断大电流而适合用作断开开关。还评估了由SiC-MOSFET、电容器和匝数比为5:15的脉冲变压器组成的IES脉冲功率发生器的特性。在充电电压为1100 V时,输出电压峰值和半高宽分别达到31.4 kV和55 ns。在负载电阻为2.5 kΩ时,最大能量传输效率为输入能量的50.2%。结果表明,MOSFET具有出色的潜力,可支持开发一种紧凑型等离子体产生系统,该系统能提供由半导体器件驱动的性能更好的脉冲功率发生器。