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收缩材料层中各向异性裂纹图案的演变。

Evolution of anisotropic crack patterns in shrinking material layers.

作者信息

Szatmári Roland, Halász Zoltán, Nakahara Akio, Kitsunezaki So, Kun Ferenc

机构信息

Department of Theoretical Physics, Doctoral School of Physics, Faculty of Science and Technology, University of Debrecen, P.O. Box 400, Debrecen, H-4002, Hungary.

Institute for Nuclear Research (Atomki), P.O. Box 51, Debrecen, H-4001, Hungary.

出版信息

Soft Matter. 2021 Nov 17;17(44):10005-10015. doi: 10.1039/d1sm01193f.

Abstract

Anisotropic crack patterns emerging in desiccating layers of pastes on a substrate can be exploited for controlled cracking with potential applications in microelectronic manufacturing. We investigate such possibilities of crack patterning in the framework of a discrete element model focusing on the temporal and spatial evolution of anisotropic crack patterns as a thin material layer gradually shrinks. In the model a homogeneous material is considered with an inherent structural disorder where anisotropy is captured by the directional dependence of the local cohesive strength. We demonstrate that there exists a threshold anisotropy below which crack initiation and propagation is determined by the disordered micro-structure, giving rise to cellular crack patterns. When the strength of anisotropy is sufficiently high, cracking is found to evolve through three distinct phases of aligned cracking which slices the sample, secondary cracking in the perpendicular direction, and finally binary fragmentation following the formation of a connected crack network. The anisotropic crack pattern results in fragments with a shape anisotropy which gradually gets reduced as binary fragmentation proceeds. The statistics of fragment masses exhibits a high degree of robustness described by a log-normal functional form at all anisotropies.

摘要

出现在基底上糊剂干燥层中的各向异性裂纹图案可用于可控开裂操作,在微电子制造领域可以发挥潜在的应用价值。我们在离散元模型的框架内研究这种裂纹图案化的可能性,重点关注随着薄材料层逐渐收缩各向异性裂纹图案的时空演变。在该模型中,考虑了一种具有固有结构无序性的均匀材料,其中各向异性通过局部内聚强度的方向依赖性来体现。我们证明存在一个阈值各向异性,低于该阈值时,裂纹萌生和扩展由无序微观结构决定,从而产生蜂窝状裂纹图案。当各向异性强度足够高时,发现裂纹扩展经历三个不同阶段:沿对齐方向的开裂将样品切开,垂直方向的二次开裂,最后在形成连通裂纹网络后发生二元破碎。各向异性裂纹图案导致碎片具有形状各向异性,随着二元破碎的进行,这种各向异性逐渐降低。在所有各向异性情况下,碎片质量的统计数据都呈现出高度的稳健性,可用对数正态函数形式来描述。

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