Liu Can, Hu Jinyong, Wu Guang, Cao Juexian, Zhang Zhiyong, Zhang Yong
Hunan Institute of Advanced Sensing and Information Technology, Xiangtan University, Xiangtan 411105, P. R. China.
School of Physics and Optoelectronics, Xiangtan University, Xiangtan 411105, P. R. China.
ACS Appl Mater Interfaces. 2021 Dec 1;13(47):56309-56319. doi: 10.1021/acsami.1c17044. Epub 2021 Nov 17.
The detection of harmful trace gases, such as formaldehyde (HCHO), is a technical challenge in the current gas sensor field. The weak electrical signal caused by trace amounts of gases is difficult to be detected and susceptible to other gases. Based on the amplification effect of a field-effect transistor (FET), a carbon-based FET-type gas sensor with a gas-sensing gate is proposed for HCHO detection at the ppb level. Semiconducting carbon nanotubes (s-CNTs) and a catalytic metal are chosen as channel and gate materials, respectively, for the FET-type gas sensor, which makes full use of the respective advantages of the channel transport layer and the sensitive gate layer. The as-prepared carbon-based FET-type gas sensor exhibits a low detection limit toward HCHO up to 20 ppb under room temperature (RT), which can be improved to 10 ppb by a further heating strategy. It also exhibits a remarkable elevated recovery rate from 80 to 97% with almost no baseline drift (2%) compared to the RT condition, revealing excellent reproducibility, stability, and recovery. The role of sensitive function in the FET-type gas sensor is performed by means of an independent gas-sensing gate, that is, the independence of the sensitive gate and the electron transmission channel is the main reason for its high sensitivity detection. We hope our work can provide an instructive approach for designing high-performance formaldehyde sensor chips with on-chip integration potential.
检测有害痕量气体,如甲醛(HCHO),是当前气体传感器领域的一项技术挑战。痕量气体产生的微弱电信号难以检测,且易受其他气体影响。基于场效应晶体管(FET)的放大效应,提出了一种具有气敏栅极的碳基FET型气体传感器,用于检测ppb级别的HCHO。对于该FET型气体传感器,分别选择半导体碳纳米管(s-CNTs)和催化金属作为沟道和栅极材料,这充分利用了沟道传输层和敏感栅极层的各自优势。所制备的碳基FET型气体传感器在室温(RT)下对高达20 ppb的HCHO表现出低检测限,通过进一步的加热策略可将其提高到10 ppb。与RT条件相比,它还表现出显著提高的恢复率,从80%提高到97%,几乎没有基线漂移(2%),显示出优异的重现性、稳定性和恢复性能。FET型气体传感器中的敏感功能通过独立的气敏栅极来实现,即敏感栅极与电子传输通道的独立性是其高灵敏度检测的主要原因。我们希望我们的工作能够为设计具有片上集成潜力的高性能甲醛传感器芯片提供一种指导性方法。