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可调谐低结晶度碳纳米管/硅肖特基结阵列及其在气体传感中的潜在应用

Tunable Low Crystallinity Carbon Nanotubes/Silicon Schottky Junction Arrays and Their Potential Application for Gas Sensing.

作者信息

Adrian Alvaro R, Cerda Daniel, Fernández-Izquierdo Leunam, Segura Rodrigo A, García-Merino José Antonio, Hevia Samuel A

机构信息

Instituto de Física, Pontificia Universidad Católica de Chile, Casilla 306, Santiago 6904411, Chile.

Centro de Investigación en Nanotecnología y Materiales Avanzados, Pontificia Universidad Católica de Chile, Casilla 306, Santiago 6904411, Chile.

出版信息

Nanomaterials (Basel). 2021 Nov 12;11(11):3040. doi: 10.3390/nano11113040.

Abstract

Highly ordered nanostructure arrays have attracted wide attention due to their wide range of applicability, particularly in fabricating devices containing scalable and controllable junctions. In this work, highly ordered carbon nanotube (CNT) arrays grown directly on Si substrates were fabricated, and their electronic transport properties as a function of wall thickness were explored. The CNTs were synthesized by chemical vapor deposition inside porous alumina membranes, previously fabricated on n-type Si substrates. The morphology of the CNTs, controlled by the synthesis parameters, was characterized by electron microscopies and Raman spectroscopy, revealing that CNTs exhibit low crystallinity (LC). A study of conductance as a function of temperature indicated that the dominant electric transport mechanism is the 3D variable range hopping. The electrical transport explored by I-V curves was approached by an equivalent circuit based on a Schottky diode and resistances related to the morphology of the nanotubes. These junction arrays can be applied in several fields, particularly in this work we explored their performance in gas sensing mode and found a fast and reliable resistive response at room temperature in devices containing LC-CNTs with wall thickness between 0.4 nm and 1.1 nm.

摘要

高度有序的纳米结构阵列因其广泛的适用性而备受关注,特别是在制造包含可扩展和可控结的器件方面。在这项工作中,制备了直接生长在硅衬底上的高度有序碳纳米管(CNT)阵列,并研究了其作为壁厚函数的电子输运特性。碳纳米管是通过化学气相沉积法在预先制备在n型硅衬底上的多孔氧化铝膜内合成的。通过电子显微镜和拉曼光谱对由合成参数控制的碳纳米管的形貌进行了表征,结果表明碳纳米管呈现出低结晶度(LC)。对电导率随温度变化的研究表明,主要的电输运机制是三维可变范围跳跃。通过基于肖特基二极管和与纳米管形貌相关的电阻的等效电路来研究I-V曲线所探索的电输运。这些结阵列可应用于多个领域,特别是在这项工作中,我们研究了它们在气敏模式下的性能,发现在室温下,对于壁厚在0.4纳米至1.1纳米之间的低结晶度碳纳米管器件,其具有快速且可靠的电阻响应。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6eb3/8623671/e666d08e55c7/nanomaterials-11-03040-g001.jpg

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