覆盖O波段的聚合物/二氧化硅混合波导热光可变光衰减器

Polymer/Silica Hybrid Waveguide Thermo-Optic VOA Covering O-Band.

作者信息

Yin Yuexin, Yao Mengke, Ding Yingzhi, Xu Xinru, Li Yue, Wu Yuanda, Zhang Daming

机构信息

State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.

College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Micromachines (Basel). 2022 Mar 25;13(4):511. doi: 10.3390/mi13040511.

DOI:10.3390/mi13040511

PMID:35457815

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9031055/

Abstract

In this paper, a polymer/silica hybrid waveguide thermo-optic variable optical attenuator (VOA), covering the O-band, is demonstrated. The switch is fabricated by simple and low-cost direct ultraviolet (UV) lithography. The multimode interferences (MMIs) used in the Mach-Zehnder interferometer (MZI)-VOA are well optimized to realize low loss and large bandwidth. The VOA shows an extinction ratio (ER) of 18.64 dB at 1310 nm, with a power consumption of 8.72 mW. The attenuation is larger than 6.99 dB over the O-band. The rise and fall time of the VOA are 184 μs and 180 μs, respectively.

摘要

本文展示了一种覆盖O波段的聚合物/二氧化硅混合波导热光可变光衰减器（VOA）。该开关通过简单且低成本的直接紫外光刻制造。马赫-曾德尔干涉仪（MZI）-VOA中使用的多模干涉（MMI）经过了优化，以实现低损耗和大带宽。该VOA在1310nm处的消光比（ER）为18.64dB，功耗为8.72mW。在O波段上衰减大于6.99dB。该VOA的上升时间和下降时间分别为184μs和180μs。