Ma Xinxue, Wang Jianli, Wang Bin, Liu Xinyue
Changchun Institute of Optics, Fine Mechanics and Physics, CAS, Changchun 130033, China.
Micromachines (Basel). 2022 Mar 30;13(4):549. doi: 10.3390/mi13040549.
In order to verify the estimated wave-front ability of the phase retrieval, a method utilized in the measurement of the aspherical optical surfaces using the phase retrieval technology is described. This technique is based on the algorithm as a solution for the measurement of the aspherical optical surfaces, whose principle is sampling a number of the given defocus images and obtaining the phase information by solving the wave-front with Fourier optical diffractive theory and mathematics optimization. We set up an experimental arrangement used to measure the aspherical optical surfaces using the improved phase retrieval. In addition, we introduced the method of optical alignment in detail, which is very important for high-precision measurements. We obtained an agreement among the error distributions, the peak value, and the root-mean-square value of a ZYGO interferometer, which demonstrates that the improved phase retrieval method can effectively estimate the wave-front and the aberrations of aspherical optical surfaces.
为了验证相位恢复算法估计波前的能力,本文描述了一种利用相位恢复技术测量非球面光学表面的方法。该技术基于一种用于测量非球面光学表面的算法,其原理是对多个给定离焦图像进行采样,并通过傅里叶光学衍射理论和数学优化求解波前来获取相位信息。我们搭建了一个用于使用改进型相位恢复技术测量非球面光学表面的实验装置。此外,我们详细介绍了光学对准方法,这对于高精度测量非常重要。我们在Zygo干涉仪的误差分布、峰值和均方根值之间取得了一致性,这表明改进型相位恢复方法能够有效地估计非球面光学表面的波前和像差。