用于准连续和多点光束转向的MEMS相位光调制器（TI-PLM）的衍射效率

Diffraction Efficiency of MEMS Phase Light Modulator, TI-PLM, for Quasi-Continuous and Multi-Point Beam Steering.

作者信息

Deng Xianyue, Tang Chin-I, Luo Chuan, Takashima Yuzuru

机构信息

James C. Wyant College of Optical Science, University of Arizona, Tucson, AZ 85719, USA.

出版信息

Micromachines (Basel). 2022 Jun 18;13(6):966. doi: 10.3390/mi13060966.

DOI:10.3390/mi13060966

PMID:35744580

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9227921/

Abstract

The recent development of the Micro Electromechanical System (MEMS) Phase Light Modulator (PLM) enables fast laser beam steering for lidar applications by displaying a Computer-Generated Hologram (CGH) without employing an iterative CGH calculation algorithm. We discuss the application of MEMS PLM (Texas Instruments PLM) for quasi-continuous laser beam steering by deterministically calculated CGHs. The effect on the diffraction efficiency of PLM non-equally spaced phase levels was quantified. We also address the CGH calculation algorithm and an experimental demonstration that steered and scanned the beam into multiple regions of interest points, enabling beam steering for lidar without sequential raster scanning.

摘要

微机电系统（MEMS）相位光调制器（PLM）的最新进展，通过显示计算机生成全息图（CGH）而无需采用迭代CGH计算算法，实现了用于激光雷达应用的快速激光束转向。我们讨论了MEMS PLM（德州仪器PLM）通过确定性计算的CGH在准连续激光束转向中的应用。量化了PLM非等间距相位水平对衍射效率的影响。我们还介绍了CGH计算算法以及一个实验演示，该演示将光束转向并扫描到多个感兴趣点区域，实现了无需顺序光栅扫描的激光雷达光束转向。