Microtechnologies Integration & Convergence Research Group, Université du Québec à Montréal, Montreal, QC H2X 3Y7, Canada.
Department of Electrical Engineering, École de Technologie Supérieure (ETS), Montreal, QC H3C 1K3, Canada.
Sensors (Basel). 2022 Aug 26;22(17):6428. doi: 10.3390/s22176428.
This paper presents the design and simulation of a mass sensitive Lamb wave microsensor with CMOS technology provided by SilTerra. In this work, the effects of the metalization ratio variation on the transmission gain, total harmonic distortion (THD), and two different resonant modes (around 66 MHz and 86 MHz) are shown. It has been found that the metalization ratio can be adjusted in order to obtain a compromise between transmission gain and sensitivity, depending on the design criteria. By adding a Si3N4 layer on top of the device, a five-fold improvement in transmission gain is reached. It was also shown that the transmission of the input differential IDT configuration is 20% more efficient than a single terminal. With this combination, the mass sensitivity is about 114 [cm2/gr].
本文提出了一种基于 SilTerra 的 CMOS 技术的质量敏感 Lamb 波微传感器的设计和模拟。在这项工作中，展示了金属化比变化对传输增益、总谐波失真（THD）以及两种不同谐振模式（约 66MHz 和 86MHz）的影响。结果表明，可以根据设计标准调整金属化比，以在传输增益和灵敏度之间取得折衷。通过在器件顶部添加一层 Si3N4，可以将传输增益提高五倍。还表明，输入差分 IDT 配置的传输效率比单端高 20%。通过这种组合，质量灵敏度约为 114 [cm2/gr]。
