Fang Jingyue, Li Xinxing, Xie Wenke, Sun Kehui
School of Physics and Electronics, Central South University, Changsha 410073, China.
Key Laboratory of Nanodevices, Suzhou Institute of Nano-Tech and Nano-Bionics, CAS, Suzhou 215213, China.
Nanomaterials (Basel). 2022 Sep 7;12(18):3102. doi: 10.3390/nano12183102.
In this paper, polystyrene microspheres were firstly prepared by seeded emulsion polymerization, and the uniform monolayer of polystyrene microspheres was prepared on the substrate by the dipping method. Then, polystyrene monolayer film was used as a mask and a low dimensional array structure of gold was prepared by bottom-up self-assembly process. After that, the method of solution etching and annealing was used, and the gold nanoparticle array was post-processed. As a result, gold nanoparticles were recrystallized, with an average diameter of about 50 nm. Subsequently, the semiconductor process was adopted, with focused ion beams induced deposition and electron beam evaporation, and single electron transistors were fabricated, based on self-assembled gold nanoparticles. Finally, the devices were fixed in a liquid helium cryostat and Coulomb blockade was observed at 320 mK. It is a novel fabrication of a single electron transistor based on gold nanoparticle array template and prepared with polystyrene nanospheres.
在本文中,首先通过种子乳液聚合制备聚苯乙烯微球,然后采用浸渍法在基底上制备聚苯乙烯微球的均匀单层膜。接着,以聚苯乙烯单层膜为掩膜,通过自下而上的自组装过程制备金的低维阵列结构。之后,采用溶液蚀刻和退火方法对金纳米颗粒阵列进行后处理。结果,金纳米颗粒重结晶,平均直径约为50nm。随后,采用半导体工艺,通过聚焦离子束诱导沉积和电子束蒸发,基于自组装金纳米颗粒制造单电子晶体管。最后,将器件固定在液氦低温恒温器中,在320mK下观察到库仑阻塞。这是一种基于金纳米颗粒阵列模板并用聚苯乙烯纳米球制备的单电子晶体管的新颖制造方法。