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基于GaSb放大器与微米级SOI波导倒装芯片集成的混合硅光子学分布布拉格反射激光器。

Hybrid silicon photonics DBR laser based on flip-chip integration of GaSb amplifiers and µm-scale SOI waveguides.

作者信息

Zia Nouman, Tuorila Heidi, Viheriälä Jukka, Ojanen Samu-Pekka, Koivusalo Eero, Hilska Joonas, Guina Mircea

出版信息

Opt Express. 2022 Jul 4;30(14):24995-25005. doi: 10.1364/OE.460883.

Abstract

The development of integrated photonics experiences an unprecedented growth dynamic, owing to accelerated penetration to new applications. This leads to new requirements in terms of functionality, with the most obvious feature being the increased need for wavelength versatility. To this end, we demonstrate for the first time the flip-chip integration of a GaSb semiconductor optical amplifier with a silicon photonic circuit, addressing the transition of photonic integration technology towards mid-IR wavelengths. In particular, an on-chip hybrid DBR laser emitting in the 2 µm region with an output power of 6 mW at room temperature is demonstrated. Wavelength locking was achieved employing a grating realized using 3 µm thick silicon-on-insulator (SOI) technology. The SOI waveguides exhibit strong mode confinement and low losses, as well as excellent mode matching with GaSb optoelectronic chips ensuring low loss coupling. These narrow line-width laser diodes with an on-chip extended cavity can generate a continuous-wave output power of more than 1 mW even when operated at an elevated temperature of 45°C. The demonstration opens an attractive perspective for the on-chip silicon photonics integration of GaSb gain chips, enabling the development of PICs in a broad spectral range extending from 1.8 µm to beyond 3 µm.

摘要

由于加速渗透到新应用领域,集成光子学的发展呈现出前所未有的增长态势。这导致了在功能方面的新要求,最明显的特征是对波长通用性的需求增加。为此,我们首次展示了GaSb半导体光放大器与硅光子电路的倒装芯片集成,解决了光子集成技术向中红外波长的转变问题。特别是,展示了一种在2μm区域发射的片上混合DBR激光器,在室温下输出功率为6mW。采用使用3μm厚绝缘体上硅(SOI)技术实现的光栅实现了波长锁定。SOI波导具有强模式限制和低损耗,以及与GaSb光电子芯片的出色模式匹配,确保了低损耗耦合。这些具有片上扩展腔的窄线宽激光二极管即使在45°C的高温下工作时也能产生超过1mW的连续波输出功率。这一演示为GaSb增益芯片的片上硅光子集成开辟了一个有吸引力的前景,能够在从1.8μm到超过3μm的宽光谱范围内开发光子集成电路(PIC)。

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