Hu Zhaoning, Li Fangfang, Wu Haotian, Liao Junhao, Wang Quan, Chen Ge, Shi Zhuofeng, Zhu Yaqi, Bu Saiyu, Zhao Yixuan, Shang Mingpeng, Lu Qi, Jia Kaicheng, Xie Qin, Wang Guorui, Zhang Xiaodong, Zhu Yinbo, Wu Hengan, Peng Hailin, Lin Li, Liu Zhongfan
School of Materials Science and Engineering, Peking University, Beijing, 100871, P. R. China.
Beijing Graphene Institute, Beijing, 100095, P. R. China.
Adv Mater. 2023 Jul;35(29):e2300621. doi: 10.1002/adma.202300621. Epub 2023 May 31.
Recently, scalable production of large-area graphene films on metal foils with promising qualities is successfully achieved by eliminating grain boundaries, wrinkles, and adlayers. The transfer of graphene from growth metal substrates onto functional substrates remains one inescapable obstacle on the road to the real commercial applications of chemical vaport deposition (CVD) graphene films. Current transfer methods still require time-consuming chemical reactions, which hinders its mass production, and produces cracks and contamination that strongly impede performance reproducibility. Therefore, graphene transfer techniques with fine intactness and cleanness of transferred graphene, and improved production efficiency would be ideal for the mass production of graphene films on destination substrates. Herein, through the engineering of interfacial forces enabled by sophisticated design of transfer medium, the crack-free and clean transfer of 4-inch-sized graphene wafers onto silicon wafers within only 15 min is realized. The reported transfer method is an important leap over the long-lasting obstacle of the batch-scale graphene transfer without degrading the quality of graphene, bringing the graphene products close to the real applications.
最近,通过消除晶界、皱纹和吸附层,成功实现了在具有良好品质的金属箔上大规模生产大面积石墨烯薄膜。将石墨烯从生长金属衬底转移到功能衬底上仍然是化学气相沉积(CVD)石墨烯薄膜实际商业应用道路上一个不可避免的障碍。目前的转移方法仍然需要耗时的化学反应,这阻碍了其大规模生产,并产生裂纹和污染,严重妨碍了性能的可重复性。因此,具有良好完整性和清洁度的转移石墨烯以及提高生产效率的石墨烯转移技术将是在目标衬底上大规模生产石墨烯薄膜的理想选择。在此,通过精心设计转移介质实现界面力工程,仅在15分钟内就实现了将4英寸大小的石墨烯晶圆无裂纹、清洁地转移到硅晶圆上。所报道的转移方法是克服批量规模石墨烯转移这一长期障碍的重要飞跃,且不会降低石墨烯的质量,使石墨烯产品更接近实际应用。