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基于氮化镓的柔性紫外微盘激光器在聚对苯二甲酸乙二酯衬底上。

Flexible GaN-based ultraviolet microdisk lasers on PET substrate.

作者信息

Gu Peng, Yang Shuai, Ma Lilong, Yang Tao, Hou Xin, Mei Yang, Ying Leiying, Long Hao, Zhang Baoping

出版信息

Opt Lett. 2023 Aug 1;48(15):4117-4120. doi: 10.1364/OL.496680.

Abstract

Flexible optoelectronics is a technique for fabricating optoelectronic devices on a flexible substrate. Compared with conventional devices, flexible optoelectronic devices can be used in more complex working environments benefiting from the mechanical flexibility. Herein, for the first time to the best of our knowledge, a flexible GaN-based microdisk laser on a polyethylene terephthalate (PET) substrate in the ultraviolet A (UVA) range was demonstrated by using thin film transfer process based on laser lift-off (LLO). The lasing wavelength is 370.5 nm with a linewidth of 0.15 nm and a threshold power density of 200 kW/cm. Additionally, a distributed Bragg reflector (DBR) was deposited on the backside of the microdisk as the bottom mirror between GaN microdisk and PET substrate, which can provide better mode confinement inside the microdisk and increases the oscillation intensity. The lasing wavelength of the flexible laser shows a 2-nm redshift under different bending curvature of the substrate, which is promising for applications such as mechanical sensing.

摘要

柔性光电子学是一种在柔性衬底上制造光电器件的技术。与传统器件相比,柔性光电器件由于具有机械柔韧性,可用于更复杂的工作环境。在此,据我们所知,首次通过基于激光剥离(LLO)的薄膜转移工艺,在聚对苯二甲酸乙二醇酯(PET)衬底上展示了一种处于紫外A(UVA)波段的柔性氮化镓基微盘激光器。其激射波长为370.5 nm,线宽为0.15 nm,阈值功率密度为200 kW/cm 。此外,在微盘背面沉积了分布式布拉格反射器(DBR)作为氮化镓微盘和PET衬底之间的底部反射镜,这可以在微盘内部提供更好的模式限制并增加振荡强度。柔性激光器的激射波长在衬底不同弯曲曲率下呈现出2-nm的红移,这在机械传感等应用方面具有潜力。

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