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椭圆振动金刚石切削加工多晶ZnSe的可加工性研究。

Investigation on the machinability of polycrystalline ZnSe by elliptical vibration diamond cutting.

作者信息

Ma Shanyi, Lu Yujiang, Fu Yufan, Li Xinhuan, Lai Jianjun, Zhang Jianguo, Chen Xiao, Xiao Junfeng, Xu Jianfeng

出版信息

Opt Express. 2024 Jan 1;32(1):482-498. doi: 10.1364/OE.504908.

Abstract

Polycrystalline zinc selenide is widely used in advanced optical systems due to its superior optical properties. However, the soft and brittle properties bring a challenge for high-quality surface processing. In recent years, elliptical vibration cutting has been proven as a promising method for machining brittle materials. In the present research, a series of grooving and planning experiments were carried out to investigate the machinability of zinc selenide with elliptical vibration cutting. The removal mechanism was analyzed from fracture characteristics, chip morphology, and phase transformation. The results show that elliptical vibration cutting is effective in suppressing cleavage-induced craters. Reducing the nominal cutting speed is beneficial to inhibit the spring back-induced tearing of grains. A 94-time increase in the critical depth of cut was achieved by vibration trajectory optimization compared to ordinary cutting. Moreover, the influence mechanism of feed on the evolution of surface morphology was revealed. Finally, a zinc selenide microlens array was successfully fabricated. The performance was evaluated by geometric parameter measurements and a multiple imaging test. The findings provide a prospective method for ductile regime machining of zinc selenide.

摘要

多晶硒化锌因其优异的光学性能而广泛应用于先进光学系统中。然而,其软脆特性给高质量表面加工带来了挑战。近年来,椭圆振动切削已被证明是一种加工脆性材料的有前途的方法。在本研究中,进行了一系列开槽和平面加工实验,以研究椭圆振动切削加工硒化锌的可加工性。从断裂特征、切屑形态和相变方面分析了去除机理。结果表明,椭圆振动切削有效地抑制了解理诱导的坑洼。降低名义切削速度有利于抑制回弹诱导的晶粒撕裂。与普通切削相比,通过振动轨迹优化使临界切削深度提高了94倍。此外,揭示了进给对表面形貌演变的影响机制。最后,成功制备了硒化锌微透镜阵列。通过几何参数测量和多重成像测试对其性能进行了评估。这些发现为硒化锌的延性域加工提供了一种有前景的方法。

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