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用于绝对折射率传感的条形加载马赫-曾德尔干涉仪。

Strip-loaded Mach-Zehnder interferometer for absolute refractive index sensing.

作者信息

Doughan Isaac, Oyemakinwa Kehinde, Ovaskainen Olli, Roussey Matthieu

机构信息

Center for Photonics Sciences, Department of Physics and Mathematics, University of Eastern Finland, 80101, Joensuu, Finland.

出版信息

Sci Rep. 2024 Feb 6;14(1):3064. doi: 10.1038/s41598-024-53326-3.

Abstract

This paper presents the design, fabrication, and characterization of a Mach-Zehnder interferometer (MZI) on a strip-loaded platform specifically developed for the measurement of refractive index variations in liquids. A novel approach of large opening in the sensing region enhances the sensitivity by using the analyte as the loading strip. This allows surpassing the performances of the conventional perforations and trenched-based MZIs and prevent protecting the reference arm. The implementation of this design resulted in a high confinement factor of approximately 23[Formula: see text] in the cladding, enabling an effective interaction between the evanescent field and analyte. Ethanol-water solutions with varying concentrations were used as analyte for the characterization of the device. The strip-loaded waveguide was a 200 nm TiO[Formula: see text] thin film on a silicon dioxide wafer and a 1.2 [Formula: see text]m wide for 800 nm-thick nLOF resist served as loading strip. The sensing area featured a 10 [Formula: see text]m wide open-ing in the loading material with a sensing length of 5 mm. The homogeneous sensitivity was experimentally determined to be 0.128, demonstrating the effectiveness of the proposed design, which enabled a refractive index change monitoring of 10[Formula: see text].

摘要

本文介绍了一种专门为测量液体折射率变化而开发的条形加载平台上的马赫-曾德尔干涉仪(MZI)的设计、制造和特性。传感区域采用大开孔的新颖方法,通过将分析物用作加载条来提高灵敏度。这使得该干涉仪超越了传统穿孔和基于沟槽的MZI的性能,并避免了对参考臂的保护。这种设计的实施在包层中产生了约23[公式:见正文]的高限制因子,使得倏逝场与分析物之间能够进行有效的相互作用。使用不同浓度的乙醇-水溶液作为分析物来表征该器件。条形加载波导是在二氧化硅晶片上的200 nm TiO[公式:见正文]薄膜,1.2[公式:见正文]m宽,800 nm厚的nLOF抗蚀剂用作加载条。传感区域在加载材料中有一个10[公式:见正文]m宽的开口,传感长度为5 mm。通过实验确定均匀灵敏度为0.128,证明了所提出设计的有效性,该设计能够监测10[公式:见正文]的折射率变化。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5346/10847090/4c3e9439d13d/41598_2024_53326_Fig1_HTML.jpg

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