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基于辅助干涉仪的光纤干涉仪光程差实时测量与不确定度评估

Real-Time Measurement and Uncertainty Evaluation of Optical Path Difference in Fiber Optic Interferometer Based on Auxiliary Interferometer.

作者信息

Li Huicong, Lou Minggan, Huang Wenzhu, Zhang Wentao

机构信息

State Key Laboratory of Transducer Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.

Center of Materials Science and Optoelectronic Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Sensors (Basel). 2024 Mar 22;24(7):2038. doi: 10.3390/s24072038.

Abstract

Optical interferometers are the main elements of interferometric sensing and measurement systems. Measuring their optical path difference (OPD) in real time and evaluating the measurement uncertainty are key to optimizing system noise and ensuring system consistency. With the continuous sinusoidal wavelength modulation of the laser, real-time OPD measurement of the main interferometer is achieved through phase comparison of the main and auxiliary interferometers. The measurement uncertainty of the main interferometer OPD is evaluated. It is the first evaluation of the impact of different auxiliary interferometer calibration methods on OPD measurements. A homodyne quadrature laser interferometer (HQLI) is used as the main interferometer, and a 3 × 3 interferometer is used as the auxiliary interferometer. The calibration of the auxiliary interferometer using optical spectrum analyzer scanning and ruler measurement is compared. The evaluation shows that the auxiliary interferometer is the most significant source of uncertainty and causes the total uncertainty to increase linearly with increasing OPD. It is proven that a high-precision calibration and large-OPD auxiliary interferometer can improve the real-time accuracy of OPD measurements based on the auxiliary interferometer. The scheme can determine the minimum uncertainty to optimize the system noise and consistency for vibration, hydroacoustic, and magnetic field measurements with OPDs of the ~m level.

摘要

光学干涉仪是干涉传感与测量系统的主要元件。实时测量其光程差(OPD)并评估测量不确定度是优化系统噪声和确保系统一致性的关键。随着激光器的连续正弦波长调制,通过主干涉仪和辅助干涉仪的相位比较实现主干涉仪的实时OPD测量。评估了主干涉仪OPD的测量不确定度。这是首次评估不同辅助干涉仪校准方法对OPD测量的影响。采用零差正交激光干涉仪(HQLI)作为主干涉仪,采用3×3干涉仪作为辅助干涉仪。比较了使用光谱分析仪扫描和标尺测量对辅助干涉仪进行校准的情况。评估表明,辅助干涉仪是最主要的不确定度来源,并且导致总不确定度随着OPD的增加而线性增加。事实证明,高精度校准和大OPD辅助干涉仪可以提高基于辅助干涉仪的OPD测量的实时精度。该方案可以确定最小不确定度,以优化系统噪声和一致性,用于光程差约为米级的振动、水声和磁场测量。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4793/11013898/13f617d2d927/sensors-24-02038-g001.jpg

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