Li Haoyu, Zhang Chengjun, Xu Hongyu, Yang Qing, Luo Zexiang, Li Cheng, Kai Lin, Meng Yizhao, Zhang Jialiang, Liang Jie, Chen Feng
State Key Laboratory for Manufacturing System Engineering and Shaanxi Key Laboratory of Photonics Technology for Information, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an, 710049, P. R. China.
School of Instrument Science and Technology, Xi'an Jiaotong University, Xi'an, 710049, P. R. China.
Adv Sci (Weinh). 2025 Jan;12(3):e2413233. doi: 10.1002/advs.202413233. Epub 2024 Nov 25.
Human hands can envelop the surface of an object and recognize its shape through touch. However, existing stretchable haptic sensors exhibit limited flexibility and stability to detect pressure during deformation, while also solely achieving recognition of planar objects. Inspired by the structure of skin tissue, an embedded construction-enabled liquid metal-based e-skin composed of a liquid metal microstructured electrode (LM-ME) array is fabricated for curved pressure mapping. The embedded LM-ME-based sensor elements are fabricated by using femtosecond laser-induced micro/nanostructures and water/hydrogel assisted patterning method, which enables high sensitivity (7.42 kPa in the range of 0-0.1 kPa) and high stability through an interlinked support isolation structure for the sensor units. The sensor array with a high interfacial toughness of 1328 J m can maintain pressure sensation under bending and stretching conditions. Additionally, the embedded construction and laser-induced bumps effectively reduce crosstalk from 58 to 7.8% compared to conventional flexible sensors with shared surfaces. The stretchable and mechanically stable sensor arrays possess shape-adaptability that enables pressure mapping on non-flat surfaces, which has great potential for object recognition in robotic skins and human-computer interaction.
人类的手能够包裹物体表面并通过触摸识别其形状。然而,现有的可拉伸触觉传感器在变形过程中检测压力时,灵活性和稳定性有限,同时仅能实现对平面物体的识别。受皮肤组织结构的启发,一种基于嵌入式结构的、由液态金属微结构电极(LM-ME)阵列组成的液态金属基电子皮肤被制造出来用于曲面压力映射。基于嵌入式LM-ME的传感器元件是通过飞秒激光诱导微纳结构和水/水凝胶辅助图案化方法制造的,该方法通过传感器单元的互连支撑隔离结构实现了高灵敏度(在0-0.1kPa范围内为7.42kPa)和高稳定性。具有1328J/m高界面韧性的传感器阵列在弯曲和拉伸条件下仍能保持压力感知。此外,与具有共享表面的传统柔性传感器相比,嵌入式结构和激光诱导凸起有效地将串扰从58%降低到7.8%。这种可拉伸且机械稳定的传感器阵列具有形状适应性,能够在非平面表面上进行压力映射,在机器人皮肤中的物体识别和人机交互方面具有巨大潜力。