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生物电子构建模块:具有三层栅极电介质设计的低压可集成有机薄膜晶体管

Bioelectronic building blocks: low-voltage integrable organic thin-film transistors with a tri-layer gate dielectric design.

作者信息

Guo Taoming, Wang Ran, Zheng Yaojie, Yang Huazhong, Liu Yongpan, Yi Teng, Tang Wei, Jiang Chen

机构信息

Department of Electronic Engineering, Tsinghua University, Beijing, China.

Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai, China.

出版信息

Mater Horiz. 2025 Sep 15;12(18):7486-7494. doi: 10.1039/d5mh00224a.

Abstract

This study presents a novel tri-layer gate dielectric design for organic thin-film transistors, tailored for bioelectronic applications, with improved yield, uniformity, and integrability for systems. The proposed tri-layer structure consists of a buffer layer, a surface-tuning layer, and a high- layer. Experimental results demonstrate a high yield of 93% with a mobility of 0.94 ± 0.07 cm V s and a threshold voltage of -0.02 ± 0.06 V, using all-photolithographic processes. Such a high device yield achieved by tri-layer design also enables scalable, large-area integration, which is hardly possible in the previous bi-layer design (of which the device yield is 37%). We demonstrated a 1024-channel bioelectronic stimulation array (an analogue system) with 4096 transistors, achieving an output current of 8.86 ± 2.0 μA over a 3 × 3 cm area, as well as several digital circuits, namely, inverters, NAND, NOR, and D flip-flops. This work highlights the importance of creating reliable, low-voltage, and integrable OTFTs as building blocks for bioelectronics, paving the way for future applications in wearable sensors and implantable systems.

摘要

本研究提出了一种用于有机薄膜晶体管的新型三层栅极电介质设计,专为生物电子应用量身定制,具有更高的良率、均匀性以及系统的可集成性。所提出的三层结构由一个缓冲层、一个表面调谐层和一个高介电常数层组成。实验结果表明,使用全光刻工艺,该结构的良率高达93%,迁移率为0.94±0.07 cm² V⁻¹ s⁻¹,阈值电压为-0.02±0.06 V。通过三层设计实现的如此高的器件良率还能够实现可扩展的大面积集成,而这在之前的双层设计中几乎是不可能的(双层设计的器件良率为37%)。我们展示了一个具有4096个晶体管的1024通道生物电子刺激阵列(一个模拟系统),在3×3平方厘米的面积上实现了8.86±2.0 μA的输出电流,以及几个数字电路,即反相器、与非门、或非门和D触发器。这项工作突出了创建可靠、低电压且可集成的有机薄膜晶体管作为生物电子学构建模块的重要性,为可穿戴传感器和植入式系统的未来应用铺平了道路。

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