Two-dimensional model of a capacitively coupled rf discharge and comparisons with experiments in the Gaseous Electronics Conference reference reactor.

Boeuf JP, Pitchford LC

Phys Rev E Stat Phys Plasmas Fluids Relat Interdiscip Topics. 1995 Feb;51(2):1376-1390. doi: 10.1103/physreve.51.1376.

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