Yang Zhen, Chlenova Anna A, Golubeva Elizaveta V, Volchkov Stanislav O, Guo Pengfei, Shcherbinin Sergei V, Kurlyandskaya Galina V
Department of Magnetism and Magnetic Nanomaterials, Ural Federal University, 620002 Ekaterinburg, Russia.
School of Physics and Electronic Engineering, Xinyang Normal University, Xinyang 464000, China.
Sensors (Basel). 2019 May 29;19(11):2468. doi: 10.3390/s19112468.
Amorphous and nanocrystalline soft magnetic materials have attracted much attention in the area of sensor applications. In this work, the magnetoimpedance (MI) effect of patterned soft ferromagnetic meander-shaped sensor elements has been investigated. They were fabricated starting from the cobalt-based amorphous ribbon using the lithography technique and chemical etching. Three-turn (S1: spacing s = 50 μm, width w = 300 μm, length l = 5 mm; S2: spacing s = 50 μm, width w = 400 μm, length l = 5 mm) and six-turn (S3: s = 40 μm, w = 250 μm, length l = 5 mm; S4: s = 40 μm, w = 250 μm and l = 8 mm) meanders were designed. The 'n' shaped meander part was denominated as "one turn". The S4 meander possesses a maximum MI ratio calculated for the total impedance ΔZ/Z ≈ 250% with a sensitivity of about 36%/Oe (for the frequency of about 45 MHz), and an MI ratio calculated for the real part of the total impedance ΔR/R ≈ 250% with the sensitivity of about 32%/Oe (for the frequency of 50 MHz). Chemical etching and the length of the samples had a strong impact on the surface magnetic properties and the magnetoimpedance. A comparative analysis of the surface magnetic properties obtained by the magneto-optical Kerr technique and MI data shows that the designed ferromagnetic meander-shaped sensor elements can be recommended for high frequency sensor applications focused on the large drop analysis. Here we understand a single large drop as the water-based sample to analyze, placed onto the surface of the MI sensor element either by microsyringe (volue range 0.5-500 μL) or automatic dispenser (volume range 0.1-50 mL).
非晶态和纳米晶态软磁材料在传感器应用领域引起了广泛关注。在本工作中，对图案化的软铁磁曲折形传感器元件的磁阻抗（MI）效应进行了研究。它们是从钴基非晶带材开始，利用光刻技术和化学蚀刻制造而成的。设计了三匝（S1：间距s = 50μm，宽度w = 300μm，长度l = 5mm；S2：间距s = 50μm，宽度w = 400μm，长度l = 5mm）和六匝（S3：s = 40μm，w = 250μm，长度l = 5mm；S4：s = 40μm，w = 250μm且l = 8mm）的曲折形状。“n”形曲折部分被称为“一匝”。S4曲折形状的总阻抗的磁阻抗比ΔZ/Z≈250%，灵敏度约为36%/Oe（对于约45MHz的频率），总阻抗实部的磁阻抗比ΔR/R≈250%，灵敏度约为32%/Oe（对于50MHz的频率）。化学蚀刻和样品长度对表面磁性能和磁阻抗有很大影响。通过磁光克尔技术获得的表面磁性能与磁阻抗数据的对比分析表明，所设计的铁磁曲折形传感器元件可推荐用于聚焦于大液滴分析的高频传感器应用。在这里，我们将单个大液滴理解为要分析的水基样品，通过微量注射器（体积范围0.5 - 500μL）或自动分配器（体积范围0.1 - 50mL）放置在磁阻抗传感器元件的表面上。
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