一种用于检测生物分子的新型介电调制栅堆叠双栅金属氧化物半导体场效应晶体管基传感器。

A Novel Dielectric Modulated Gate-Stack Double-Gate Metal-Oxide-Semiconductor Field-Effect Transistor-Based Sensor for Detecting Biomolecules.

机构信息

Department of ECE, Haldia Institute of Technology, Haldia 721657, India.

School of Electronics Engineering, KIIT University, Bhubaneswar 751024, India.

出版信息

Sensors (Basel). 2023 Mar 8;23(6):2953. doi: 10.3390/s23062953.

DOI:10.3390/s23062953

PMID:36991665

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10052121/

Abstract

In this article, the performance of n-type junctionless (JL) double-gate (DG) MOSFET-based biosensors with and without gate stack (GS) has been studied. Here, the dielectric modulation (DM) method is applied to detect biomolecules in the cavity. The sensitivity of n-type JL-DM-DG-MOSFET and n-type JL-DM-GSDG-MOSFET-based biosensors have also been evaluated. The sensitivity (ΔV) improved in JL-DM-GSDG MOSFET/JL-DM-DG-MOSFET-based biosensors for neutral/charged biomolecules is 116.66%/66.66% and 1165.78%/978.94%, respectively, compared with the previously reported results. The electrical detection of biomolecules is validated using the ATLAS device simulator. The noise and analog/RF parameters are compared between both biosensors. A lower threshold voltage is observed in the GSDG-MOSFET-based biosensor. The I/I ratio is higher for DG-MOSFET-based biosensors. The proposed GSDG-MOSFET-based biosensor demonstrates higher sensitivity than the DG-MOSFET-based biosensor. The GSDG-MOSFET-based biosensor is suitable for low-power, high-speed, and high sensitivity applications.

摘要

本文研究了具有和不具有栅堆栈 (GS) 的 n 型结型无限制 (JL) 双栅 (DG) MOSFET 生物传感器的性能。这里，应用介电调制 (DM) 方法来检测腔体内的生物分子。还评估了基于 n 型 JL-DM-DG-MOSFET 和 n 型 JL-DM-GSDG-MOSFET 的生物传感器的灵敏度。与之前的报告结果相比，中性/带电生物分子在 JL-DM-GSDG MOSFET/JL-DM-DG-MOSFET 生物传感器中的灵敏度（ΔV）提高了 116.66%/66.66%和 1165.78%/978.94%。使用 ATLAS 器件模拟器验证了生物分子的电检测。比较了两种生物传感器的噪声和模拟/RF 参数。在基于 GSDG-MOSFET 的生物传感器中观察到较低的阈值电压。基于 DG-MOSFET 的生物传感器的 I/I 比更高。与基于 DG-MOSFET 的生物传感器相比，所提出的基于 GSDG-MOSFET 的生物传感器具有更高的灵敏度。基于 GSDG-MOSFET 的生物传感器适用于低功率、高速和高灵敏度应用。