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纳秒和飞秒激光烧蚀黄铜:颗粒和电感耦合等离子体质谱测量

Nanosecond and femtosecond laser ablation of brass: particulate and ICPMS measurements.

作者信息

Liu C, Mao X L, Mao S S, Zeng X, Greif R, Russo R E

机构信息

Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.

出版信息

Anal Chem. 2004 Jan 15;76(2):379-83. doi: 10.1021/ac035040a.

Abstract

Femtosecond and nanosecond lasers were compared for ablating brass alloys. All operating parameters from both lasers were equal except for the pulse duration. The ablated aerosol vapor was collected on silicon substrates for particle size measurements or sent into an inductively coupled plasma mass spectrometer. The diameters and size distribution of particulates were measured from scanning electron microscope (SEM) images of the collected ablated aerosol. SEM measurements showed that particles ablated using nanosecond pulses were single spherical entities ranging in diameter from several micrometers to several hundred nanometers. Primary particles ablated using femtosecond ablation were approximately 100 nm in diameter but formed large agglomerates. ICPMS showed enhanced signal intensity and stability using femtosecond compared to nanosecond laser ablation.

摘要

对飞秒激光和纳秒激光在烧蚀黄铜合金方面进行了比较。除脉冲持续时间外,两种激光的所有操作参数均相同。烧蚀产生的气溶胶蒸汽被收集在硅基板上用于粒度测量,或被送入电感耦合等离子体质谱仪。通过收集的烧蚀气溶胶的扫描电子显微镜(SEM)图像测量颗粒的直径和尺寸分布。SEM测量表明,使用纳秒脉冲烧蚀的颗粒是单个球形实体,直径范围从几微米到几百纳米。使用飞秒烧蚀的初级颗粒直径约为100纳米,但形成了大的团聚体。电感耦合等离子体质谱(ICPMS)显示,与纳秒激光烧蚀相比,飞秒激光烧蚀的信号强度和稳定性有所增强。

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