Tong Tao, Li Jinggao, Longtin Jon P
Department of Mechanical Engineering, State University of New York at Stony Brook, Stony Brook, New York 11794-2300, USA.
Appl Opt. 2004 Mar 20;43(9):1971-80. doi: 10.1364/ao.43.001971.
Ultrafast laser micromachining provides many advantages for precision micromachining. One challenging problem, however, particularly for multilayer and heterogeneous materials, is how to prevent a given material from being ablated, as ultrafast laser micromachining is generally material insensitive. We present a real-time feedback control system for an ultrafast laser micromachining system based on laser-induced breakdown spectroscopy (LIBS). The characteristics of ultrafast LIBS are reviewed and discussed so as to demonstrate the feasibility of the technique. Comparison methods to identify the material emission patterns are developed, and several of the resulting algorithms were implemented into a real-time computer control system. LIBS-controlled micromachining is demonstrated for the fabrication of microheater structures on thermal sprayed materials. Compared with a strictly passive machining process without any such feedback control, the LIBS-based system provides several advantages including less damage to the substrate layer, reduced machining time, and more-uniform machining features.
超快激光微加工在精密微加工方面具有诸多优势。然而，一个具有挑战性的问题，尤其是对于多层和异质材料而言，是如何防止特定材料被烧蚀，因为超快激光微加工通常对材料不敏感。我们提出了一种基于激光诱导击穿光谱（LIBS）的超快激光微加工系统实时反馈控制系统。对超快LIBS的特性进行了综述和讨论，以证明该技术的可行性。开发了识别材料发射模式的比较方法，并将其中几种算法应用于实时计算机控制系统。展示了基于LIBS控制的微加工在热喷涂材料上制造微加热器结构的应用。与没有任何此类反馈控制的严格被动加工过程相比，基于LIBS的系统具有几个优点，包括对基底层的损伤更小、加工时间缩短以及加工特征更均匀。
