Takagi Y, Kimura M
Advanced Technology Research Laboratories at Futtsu, Nippon Steel Corporation, 20-1 Shintomi, Futtsu, Chiba 293, Japan.
J Synchrotron Radiat. 1998 May 1;5(Pt 3):488-90. doi: 10.1107/S090904959800123X.
A new and more 'generalized' grazing-incidence-angle X-ray diffraction (G-GIXD) method which enables simultaneous measurements both of in- and out-of-plane diffraction images from surface and interface structures has been developed. While the method uses grazing-incidence-angle X-rays like synchrotron radiation as an incident beam in the same manner as in 'traditional' GIXD, two-dimensional (area) detectors like image plates and a spherical-type goniometer are used as the data-collection system. In this way, diffraction images both in the Seemann-Bohlin (out-of-plane) and GIXD geometry (in-plane) can be measured simultaneously without scanning the detectors. The method can be applied not only to the analysis of the in-plane crystal structure of epitaxically grown thin films, but also to more general research topics like the structural analysis of polycrystalline mixed phases of thin surface and interface layers.
一种新的、更“通用”的掠入射角X射线衍射(G-GIXD)方法已经开发出来,该方法能够同时测量来自表面和界面结构的面内和面外衍射图像。虽然该方法与“传统”GIXD一样,使用掠入射角X射线(如同步辐射)作为入射光束,但使用像成像板这样的二维(面积)探测器和球形测角仪作为数据收集系统。通过这种方式,无需扫描探测器就可以同时测量Seemann-Bohlin(面外)和GIXD几何结构(面内)中的衍射图像。该方法不仅可以应用于外延生长薄膜的面内晶体结构分析,还可以应用于更一般的研究课题,如薄表面和界面层多晶混合相的结构分析。