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条带分层薄膜单侧屈曲模式的稳定性图。

Stability diagram of unilateral buckling patterns of strip-delaminated films.

作者信息

Parry G, Cimetière A, Coupeau C, Colin J, Grilhé J

机构信息

Laboratoire de Métallurgie Physique, UMR 6630 du CNRS, Université de Poitiers, BP 30179, 86962 Futuroscope Cedex, France.

出版信息

Phys Rev E Stat Nonlin Soft Matter Phys. 2006 Dec;74(6 Pt 2):066601. doi: 10.1103/PhysRevE.74.066601. Epub 2006 Dec 5.

Abstract

Thin films deposited on substrates are usually submitted to large residual compression stresses, causing delamination and buckling of the film into various patterns. The present study is focused on the different equilibria arising on strip-shaped delaminated areas. The three most common types of buckling patterns observed on such strips are known as the straight-sided wrinkles, bubble pattern, and telephone cord blisters. The stability of those equilibria as a function of the two stress components of the loading is investigated. The Föppl-Von Karman model for elastic plates is used for theoretical aspects. The post-critical equilibrium paths of the buckling patterns are investigated numerically by means of the finite-element method. The substrate is assumed to be rigid and the contact to be frictionless. The equilibrium solutions can be classified into families of homologous equilibria allowing the identification of dimensionless parameters for the study of stability. A mapping of the different stable post-critical equilibria is given. It is shown that the straight-sided wrinkles and the bubbles are associated with anisotropy of stresses and/or of elastic properties, whereas the telephone cords are stable at high isotropic stresses. The morphological transitions are experimentally evidenced by in situ atomic force microscopy observations of a nickel 50-nm-thick film under stress.

摘要

沉积在基底上的薄膜通常会承受较大的残余压缩应力,导致薄膜分层并屈曲成各种图案。本研究聚焦于条形分层区域出现的不同平衡状态。在这类条带上观察到的三种最常见的屈曲图案分别称为直边皱纹、气泡图案和电话线水泡。研究了这些平衡状态作为加载的两个应力分量的函数的稳定性。弹性板的Föppl-Von Karman模型用于理论分析。通过有限元方法对屈曲图案的临界后平衡路径进行了数值研究。假设基底是刚性的且接触无摩擦。平衡解可分为同源平衡族,从而能够确定用于稳定性研究的无量纲参数。给出了不同稳定临界后平衡状态的映射图。结果表明,直边皱纹和气泡与应力和/或弹性性质的各向异性有关,而电话线在高各向同性应力下是稳定的。通过对受压的50纳米厚镍膜进行原位原子力显微镜观察,从实验上证明了形态转变。

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