Design and analysis of a double superimposed chamber valveless MEMS micropump.

The newly designed micropump model proposed consists of a valveless double chamber pump completely simulated and optimized for drug delivery conditions. First, the inertia force and viscous loss in relation to actuation, pressure, and frequency is considered, and then a model of the nozzle/diffuser elements is introduced. The value of the flowrate obtained from the first model is then used to determine the loss coefficients starting from geometrical properties and flow velocity. From the developed model IT analysis is performed to predict the micropump performance based on the actuation parameters and no energy loss. A single-chamber pump with geometrical dimensions equal to each of the chambers of the double-chamber pump was also developed, and the results from both models are then compared for equally applied actuation pressure and frequency. Results show that the proposed design gives a maximum flow working frequency that is about 30 per cent lower than the single chamber design, with a maximum flowrate that is 140 per cent greater than that of the single chamber. Finally, the influences of geometrical properties on flowrate, maximum flow frequency, loss coefficients, and membrane strain are examined. The results show that the nozzle/ diffuser initial width and chamber side length are the most critical dimensions of the design.