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通过原子层沉积法以有机纳米线为模板制备氧化铝纳米管

Organic nanowire-templated fabrication of alumina nanotubes by atomic layer deposition.

作者信息

Wang Chih-Chieh, Kei Chi-Chung, Yu Ya-Wen, Perng Tsong-Pyng

机构信息

Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, Taiwan.

出版信息

Nano Lett. 2007 Jun;7(6):1566-9. doi: 10.1021/nl070404q. Epub 2007 May 23.

Abstract

Alumina nanotubes were fabricated by a template method. Tris-(8-hydroxyquinoline) gallium (GaQ3) organic nanowires were used as a soft template for coating with alumina using an atomic layer deposition technique. The deposition was conducted at 25 degrees C by using trimethylaluminum and distilled water as the precursors of Al2O3. Amorphous alumina nanotubes were obtained after removing the GaQ3 by dissolving in toluene or by heat treatment at 350 degrees C. The amorphous nanotubes could be crystallized by heating at 900 degrees C for 1 h in vacuum.

摘要

通过模板法制备了氧化铝纳米管。三(8-羟基喹啉)镓(GaQ3)有机纳米线被用作软模板,采用原子层沉积技术用氧化铝进行包覆。沉积在25℃下进行,使用三甲基铝和蒸馏水作为Al2O3的前驱体。通过溶解在甲苯中或在350℃下进行热处理去除GaQ3后,得到非晶态氧化铝纳米管。非晶态纳米管可通过在真空中于900℃加热1小时使其结晶。

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