Walton S G, Fernsler R F, Leonhardt D
Plasma Physics Division, US Naval Research Laboratory, Washington, DC 20375, USA.
Rev Sci Instrum. 2007 Aug;78(8):083503. doi: 10.1063/1.2769352.
A method is described for measuring ion energy distributions using a commercially available, combined energy analyzer/mass spectrometer. The distributions were measured at an electrode located adjacent to pulsed, electron beam-generated plasmas produced in argon. The method uses energy-dependent tuning and was tested for various plasma conditions. The results indicate an improved collection efficiency of low-energy ions when compared to conventional approaches in measuring ion energy distributions.
描述了一种使用市售的组合式能量分析仪/质谱仪测量离子能量分布的方法。在与氩气中脉冲电子束产生的等离子体相邻的电极处测量分布情况。该方法采用能量依赖调谐,并针对各种等离子体条件进行了测试。结果表明,与测量离子能量分布的传统方法相比,低能离子的收集效率有所提高。