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用于二维图案化阵列的三维胶体晶体辅助光刻技术

Three-dimensional colloidal crystal-assisted lithography for two-dimensional patterned arrays.

作者信息

Sun Zhiqiang, Li Yunfeng, Wang Yanfang, Chen Xin, Zhang Junhu, Zhang Kai, Wang Zifeng, Bao Chunxiao, Zeng Jianbo, Zhao Bing, Yang Bai

机构信息

State Key Lab of Supramolecular Structure and Materials, College of Chemistry, Jilin University, Changchun 130012, People's Republic of China.

出版信息

Langmuir. 2007 Oct 9;23(21):10725-31. doi: 10.1021/la7015935. Epub 2007 Sep 18.

Abstract

In this paper, we report our recent work on preparing two-dimensional patterned microstructure arrays using three-dimensional colloidal crystals as templates, namely, colloidal crystal-assisted lithography. Two alternative processes are described and involved in colloidal crystal-assisted lithography. One is based upon imprinting the polymer films with three-dimensional silica colloidal crystals, and the other is based upon chemically depositing Ag microstructures on Au substrates covered by polymer colloidal crystals. By varying the experimental conditions in the colloidal crystal-assisted lithography process, we can intentionally control the morphologies of the resulting microstructures. The resultant Ag-coated Au substrates can be used as surface-enhanced Raman scattering substrates, and they would provide an ideal system for the mechanism study of surface-enhanced Raman scattering. We expect that colloidal crystal-assisted lithography will be a versatile approach which can be applied to patterning other materials such as functional molecules, polymers, oxides, and metals.

摘要

在本文中,我们报告了我们近期利用三维胶体晶体作为模板制备二维图案化微结构阵列的工作,即胶体晶体辅助光刻技术。文中描述了胶体晶体辅助光刻技术所涉及的两种不同工艺。一种是基于用三维二氧化硅胶体晶体对聚合物薄膜进行压印,另一种是基于在覆盖有聚合物胶体晶体的金基底上化学沉积银微结构。通过改变胶体晶体辅助光刻工艺中的实验条件,我们可以有意地控制所得微结构的形态。所得的涂银金基底可用作表面增强拉曼散射基底,它们将为表面增强拉曼散射的机理研究提供一个理想的体系。我们期望胶体晶体辅助光刻技术将成为一种通用的方法,可应用于对其他材料(如功能分子、聚合物、氧化物和金属)进行图案化。

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