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通过载波相位调制消除外差干涉仪的非线性

Elimination of heterodyne interferometer nonlinearity by carrier phase modulation.

作者信息

Dubovitsky Serge, Lay Oliver P, Seidel David J

出版信息

Opt Lett. 2002 Apr 15;27(8):619-21. doi: 10.1364/ol.27.000619.

Abstract

Accuracy in measuring displacement in optical interferometers is limited by cyclic errors introduced by various leakage paths within the system. Existing techniques to reduce this nonlinearity do not work when there is large optical loss in the target path, such as for long-range measurements. We describe a new approach to reducing nonlinearity that overcomes these limitations. Based on phase modulation of the laser light, and requiring minimal additional components, experiments have demonstrated rejection of the effects of leakage in the presence of large optical loss.

摘要

光学干涉仪中位移测量的精度受到系统内各种泄漏路径引入的周期性误差的限制。当目标路径存在较大光学损耗时,例如在进行远程测量时,现有的减少这种非线性的技术就不起作用了。我们描述了一种克服这些限制的减少非线性的新方法。基于激光的相位调制,且只需极少的附加组件,实验已证明在存在较大光学损耗的情况下能够抑制泄漏的影响。

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