Surface roughness evaluation via ultrasonic scanning.

Despite extensive applications of ultrasonic waves to various nondestructive testing and evaluation of materials, scattering of focused ultrasonic waves due to surface roughness has not been fully investigated. This paper presents an analytical and experimental evaluation of surface roughness measurement using focused ultrasonic beams. The characteristics of focused ultrasonic waves are analyzed by using the impulse response method with a sine-modulated Gaussian pulse as source. First, the beam profile in the focal plane of the focused ultrasonic transducer is analyzed both numerically and experimentally. Second, peak amplitude distribution and reflected waveforms from a flat surface with various incident angles are analytically generated and compared with experimental results. Then, the peak amplitudes of the ultrasonic waves reflected from cusped surfaces which are easily found among machined surfaces are analyzed and compared with experimental data for the first time. The analysis shows good agreement between analytical and experimental results. The excellent correlation between the measurements using a profilometer and the proposed ultrasonic system demonstrates a good potential for surface roughness measurement by ultrasonic sensing.