采用阳极氧化的新型电极分离技术及其在声表面波叉指换能器中的应用。
New electrode separation technology using anodic oxidation and application to SAW interdigital transducers.
作者信息
Yamanouchi K, Meguro T, Matsumoto K
机构信息
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai.
出版信息
IEEE Trans Ultrason Ferroelectr Freq Control. 1992;39(3):447-52. doi: 10.1109/58.143179.
By anodic oxidation of the edges of the portions of the Al film under photoresist, controllable gaps between electrodes with good insulation can be obtained. These techniques are applied to realize a surface-acoustic-wave (SAW) narrow gap interdigital transducer (NG-IDT) and narrow gap unidirectional transducer (NG-UDT). The experimental result shows 7.2 dB insertion loss with amplitude ripples of +/-1.2 dB for a conventional NG-IDT. Directives of 3-dB/transducer at 440 MHz (fundamental) and 13-dB transducer at 870 MHz (second-harmonic operation) for a new floating electrode type unidirectional transducer (NG-FEUDT) are demonstrated. Also a three transducer low loss filter using a combination of NG-IDT and NG-FEUDT exhibits 3.46 dB insertion loss at 894 MHz (second-harmonic operation, electrode width of 1.7 mum) with sidelobe suppression greater than 35 dB.
通过对光刻胶下铝膜部分边缘进行阳极氧化，可以获得具有良好绝缘性能的电极之间的可控间隙。这些技术被应用于实现表面声波（SAW）窄间隙叉指换能器（NG-IDT）和窄间隙单向换能器（NG-UDT）。实验结果表明，传统的NG-IDT插入损耗为7.2 dB，幅度纹波为±1.2 dB。对于新型浮动电极型单向换能器（NG-FEUDT），在440 MHz（基频）时的换能器指向性为3 dB，在870 MHz（二次谐波操作）时为13 dB。此外，使用NG-IDT和NG-FEUDT组合的三换能器低损耗滤波器在894 MHz（二次谐波操作，电极宽度为1.7μm）时的插入损耗为3.46 dB，旁瓣抑制大于35 dB。
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