Ueda Masanori, Iwaki Masafumi, Nishihara Tokihiro, Satoh Yoshio, Hashimoto Ken-ya
Satoh Fellow Group, Fujitsu Laboratories Ltd., Akashi, 674-8555 Japan.
IEEE Trans Ultrason Ferroelectr Freq Control. 2008 Apr;55(4):849-56. doi: 10.1109/TUFFC.2008.719.
This paper describes a circuit model for the analysis of nonlinearity in the filters based on radiofrequency (RF) bulk acoustic wave (BAW) resonators. The nonlinear output is expressed by a current source connected parallel to the linear resonator. Amplitude of the nonlinear current source is programmed proportional to the product of linear currents flowing in the resonator. Thus, the nonlinear analysis is performed by the common linear analysis, even for complex device structures. The analysis is applied to a ladder-type RF BAW filter, and frequency dependence of the nonlinear output is discussed. Furthermore, this analysis is verified through comparison with experiments.
本文描述了一种用于分析基于射频(RF)体声波(BAW)谐振器的滤波器非线性的电路模型。非线性输出由与线性谐振器并联的电流源表示。非线性电流源的幅度被编程为与在谐振器中流动的线性电流的乘积成比例。因此,即使对于复杂的器件结构,非线性分析也可以通过常见的线性分析来进行。该分析应用于梯形RF BAW滤波器,并讨论了非线性输出的频率依赖性。此外,通过与实验比较验证了该分析。