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通过化学气相沉积制备的纳米结构氧化镍薄膜及其电致变色性能。

Nanostructured nickel oxide films prepared by chemical vapor deposition and their electrochromic properties.

作者信息

Vargas Garcia J R, Lazcano Ugalde E M, Hernandez Santiago F, Hallen Lopez J M

机构信息

National Polytechnic Institute, ESIQIE, Department of Metallurgical Engineering, Mexico 07300 D.F., Mexico.

出版信息

J Nanosci Nanotechnol. 2008 May;8(5):2703-6. doi: 10.1166/jnn.2008.563.

Abstract

The influence of the deposition conditions on the structural features and electrochromic properties of nickel oxide (NiO) films prepared by chemical vapor deposition has been investigated. NiO films have been prepared on fluorine doped tin oxide (FTO) coated glass substrates from nickel-acetylacetonate precursor and their electrochromic properties have been studied by cyclic voltammetry in a 0.1 M KOH solution at room temperature. Films exhibiting only the NiO phase were obtained at deposition temperatures higher than 450 degrees C in a wide range of reactor pressures (0.13 to 66.6 kPa). Particularly, NiO films prepared at 500-550 degrees C from 0.13 to 53.3 kPa are transparent in nature and exhibit a crystallite size varying from 10 to 60 nm. An appreciable anodic electrochromic change from transparent to black coloured resulted from a very porous surface morphology and film thickness of about 3.5 microm. The electrochromic change was maintained over 3000 switching cycles. Nanostructured 3.5 microm-thick NiO films showed a maximum difference in optical transmittance of about 40% in the near-infrared region. These results make the nanostructured NiO films comparables with those prepared by other deposition techniques.

摘要

研究了化学气相沉积制备的氧化镍(NiO)薄膜的沉积条件对其结构特征和电致变色性能的影响。以乙酰丙酮镍为前驱体,在氟掺杂氧化锡(FTO)涂覆的玻璃基板上制备了NiO薄膜,并在室温下于0.1 M KOH溶液中通过循环伏安法研究了其电致变色性能。在高于450℃的沉积温度下,于较宽的反应压力范围(0.13至66.6 kPa)内获得了仅呈现NiO相的薄膜。特别地,在500 - 550℃、0.13至53.3 kPa条件下制备的NiO薄膜本质上是透明的,且微晶尺寸在10至60 nm之间变化。非常多孔的表面形貌和约3.5微米的薄膜厚度导致了从透明到黑色的明显阳极电致变色变化。这种电致变色变化在3000次开关循环中得以保持。纳米结构的3.5微米厚NiO薄膜在近红外区域的最大光学透过率差异约为40%。这些结果使得纳米结构的NiO薄膜与通过其他沉积技术制备的薄膜具有可比性。

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