一种微机电系统离散双曲抛物面几何形状超声传感器微阵列的设计。
Design of a MEMS discretized hyperbolic paraboloid geometry ultrasonic sensor microarray.
作者信息
Meloche Matthew, Chowdhury Sazzadur
机构信息
Department of Electrical and Computer Engineering, University of Windsor, Windsor, Ontario, Canada.
出版信息
IEEE Trans Ultrason Ferroelectr Freq Control. 2008;55(6):1363-72. doi: 10.1109/TUFFC.2008.799.
Design of a discretized hyperbolic paraboloid geometry beamforming array of capacitive micromachined ultrasonic transducers (CMUT) has been presented. The array can intrinsically provide a broadband constant beamwidth beamforming capability without any microelectronic signal processing. A mathematical model has been developed and verified to characterize the array response. A design methodology has been presented that enables determination of the array's physical dimensions and CMUT modeling in a straightforward manner. Developed methodology has been used to design two discretized hyperbolic paraboloid geometry beamforming CMUT arrays: one in the 2.3 MHz to 5.2 MHz frequency range and another in the 113 kHz to 167 kHz frequency range. CMUTs have been designed using a cross-verification method that involves lumped element modeling, 3-D electromechanical finite element analysis (FEA), and microfabrication simulation. The developed array has the potential to be used in real-time automotive collision-avoidance applications, medical diagnostic imaging and therapeutic applications, and industrial sensing.
本文提出了一种电容式微机械超声换能器（CMUT）离散化双曲抛物面几何波束形成阵列的设计。该阵列本质上能够提供宽带恒定波束宽度的波束形成能力，无需任何微电子信号处理。已开发并验证了一个数学模型来表征阵列响应。提出了一种设计方法，能够以直接的方式确定阵列的物理尺寸并进行CMUT建模。所开发的方法已用于设计两个离散化双曲抛物面几何波束形成CMUT阵列：一个在2.3 MHz至5.2 MHz频率范围内，另一个在113 kHz至167 kHz频率范围内。CMUT采用交叉验证方法进行设计，该方法涉及集总元件建模、三维机电有限元分析（FEA）和微制造模拟。所开发的阵列有潜力用于实时汽车防撞应用、医学诊断成像和治疗应用以及工业传感。
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