Meloche Matthew, Chowdhury Sazzadur
Department of Electrical and Computer Engineering, University of Windsor, Windsor, Ontario, Canada.
IEEE Trans Ultrason Ferroelectr Freq Control. 2008;55(6):1363-72. doi: 10.1109/TUFFC.2008.799.
Design of a discretized hyperbolic paraboloid geometry beamforming array of capacitive micromachined ultrasonic transducers (CMUT) has been presented. The array can intrinsically provide a broadband constant beamwidth beamforming capability without any microelectronic signal processing. A mathematical model has been developed and verified to characterize the array response. A design methodology has been presented that enables determination of the array's physical dimensions and CMUT modeling in a straightforward manner. Developed methodology has been used to design two discretized hyperbolic paraboloid geometry beamforming CMUT arrays: one in the 2.3 MHz to 5.2 MHz frequency range and another in the 113 kHz to 167 kHz frequency range. CMUTs have been designed using a cross-verification method that involves lumped element modeling, 3-D electromechanical finite element analysis (FEA), and microfabrication simulation. The developed array has the potential to be used in real-time automotive collision-avoidance applications, medical diagnostic imaging and therapeutic applications, and industrial sensing.
本文提出了一种电容式微机械超声换能器（CMUT）离散化双曲抛物面几何波束形成阵列的设计。该阵列本质上能够提供宽带恒定波束宽度的波束形成能力，无需任何微电子信号处理。已开发并验证了一个数学模型来表征阵列响应。提出了一种设计方法，能够以直接的方式确定阵列的物理尺寸并进行CMUT建模。所开发的方法已用于设计两个离散化双曲抛物面几何波束形成CMUT阵列：一个在2.3 MHz至5.2 MHz频率范围内，另一个在113 kHz至167 kHz频率范围内。CMUT采用交叉验证方法进行设计，该方法涉及集总元件建模、三维机电有限元分析（FEA）和微制造模拟。所开发的阵列有潜力用于实时汽车防撞应用、医学诊断成像和治疗应用以及工业传感。
