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用于以亚纳米精度测量拼接镜形状的双波长低相干瞬态相移干涉仪。

Dual-wavelength low-coherence instantaneous phase-shifting interferometer to measure the shape of a segmented mirror with subnanometer precision.

作者信息

Wilhelm Rainer, Luong Bruno, Courteville Alain, Estival Sébastien, Gonté Frédéric, Schuhler Nicolas

机构信息

FOGALE nanotech, 125, Rue de l'Hostellerie, 30900 Nîmes, France.

出版信息

Appl Opt. 2008 Oct 10;47(29):5473-91. doi: 10.1364/ao.47.005473.

Abstract

We present a noncontact optical metrology measuring the pistons and tip/tilt angles of the 61 hexagonal segments of a compact-sized segmented mirror. The instrument has been developed within the scope of a design study for the European Extremely Large Telescope (E-ELT). It is used as reference sensor for cophasing of the mirror segments in closed-loop control. The mirror shape is also measured by different types of stellar light-based phasing cameras whose performances will be evaluated with regard to a future E-ELT. Following a description of the system architecture, the second part of the paper presents experimental results demonstrating the achieved precision: 0.48 nm rms in piston and 74 nrad rms in tip/tilt.

摘要

我们展示了一种非接触式光学计量方法,用于测量紧凑型拼接镜61个六边形镜段的活塞位移以及倾斜和俯仰角度。该仪器是在欧洲极大望远镜(E-ELT)设计研究范围内开发的。它被用作闭环控制中镜段共相的参考传感器。镜形也由不同类型的基于星光的相位相机测量,其性能将针对未来的E-ELT进行评估。在描述了系统架构之后,本文第二部分展示了实验结果,证明了所达到的精度:活塞位移的均方根误差为0.48纳米,倾斜和俯仰的均方根误差为74纳弧度。

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