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用于复制阳极氧化铝膜中孔阵列的锥形钨印章。

Conical tungsten stamps for the replication of pore arrays in anodic aluminium oxide films.

作者信息

LeClere D J, Thompson G E, Derby B

机构信息

The University of Manchester, Corrosion and Protection Centre, The Mill, PO Box 88, Sackville Street, Manchester M60 1QD, UK.

出版信息

Nanotechnology. 2009 Jun 17;20(24):245304. doi: 10.1088/0957-4484/20/24/245304. Epub 2009 May 26.

Abstract

A tungsten master stamp has been generated by applying a novel procedure that includes two-step anodizing, followed by sequential anodizing and pore widening to develop nominally funnelled pores. These conical-shaped pores were filled with tungsten by sputter coating to manufacture a master stamp. Under a pressure of 65 MPa, the master stamp successfully embossed the surface of annealed and electropolished aluminium. The embossed surface was then used to control the position of pores created by anodizing under the conditions used to produce the original pore array.

摘要

通过应用一种新颖的工艺制造出了一个钨母版印章,该工艺包括两步阳极氧化,随后依次进行阳极氧化和扩孔以形成标称的漏斗形孔。通过溅射镀膜将这些锥形孔填充钨来制造母版印章。在65兆帕的压力下,母版印章成功地在退火和电解抛光的铝表面压印。然后,利用压印表面来控制在用于制造原始孔阵列的条件下通过阳极氧化产生的孔的位置。

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