Tal Amir, Chen Yun-Sheng, Williams Henry E, Rumpf Raymond C, Kuebler Stephen M
CREOL, The College of Optics and Photonics, University of Central Florida, Orlando, FL 32816, USA.
Opt Express. 2007 Dec 24;15(26):18283-93. doi: 10.1364/oe.15.018283.
Three-dimensional metallodielectric photonic crystals were created by fabricating a micron-scale polymeric template using multiphoton direct laser writing (DLW) in SU-8 and conformally and selectively coating the template with copper (Cu) via nanoparticle-nucleated electroless metallization. This process deposits a uniform metal coating, even deep within a lattice, because it is not directional like sputter-coating or evaporative deposition. Infrared reflectance spectra show that upon metallization the optical behavior transitions fully from a dielectric photonic crystal to that of a metal photonic crystal (MPC). After depositing 50 nm of Cu, the MPCs exhibit a strong plasmonic stop band having reflectance greater than 80% across the measured part of the band and reaching as high as 95% at some wavelengths. Numerical simulations match remarkably well with the experimental data and predict all dominant features observed in the reflectance measurements, showing that the MPCs are structurally well formed. These data show that the Cu-based process can be used to create high performance MPCs and devices that are difficult or impossible to fabricate by other means.
通过在SU-8中使用多光子直接激光写入(DLW)制造微米级聚合物模板,并通过纳米颗粒成核的化学镀将模板均匀且选择性地用铜(Cu)包覆,从而制备出三维金属-介质光子晶体。该工艺能够沉积均匀的金属涂层,即使在晶格深处也能如此,因为它不像溅射镀膜或蒸发沉积那样具有方向性。红外反射光谱表明,金属化后,光学行为从介电光子晶体完全转变为金属光子晶体(MPC)的光学行为。在沉积50nm的铜之后,MPC呈现出一个很强的等离子体阻带,在该阻带的测量范围内反射率大于80%,在某些波长处高达95%。数值模拟与实验数据非常吻合,并预测了反射率测量中观察到的所有主要特征,表明MPC在结构上形成良好。这些数据表明,基于铜的工艺可用于制造高性能的MPC以及用其他方法难以或无法制造的器件。