用于光子微悬臂梁阵列的采用双台阶肋形波导和差分分光器的面内全光转换

In-plane all-photonic transduction with differential splitter using double-step rib waveguide for photonic microcantilever arrays.

作者信息

Noh Jong Wook, Anderson Ryan R, Kim Seunghyun, Hu Weisheng, Nordin Gregory P

机构信息

Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah 84602, USA.

出版信息

Opt Express. 2009 Oct 26;17(22):20012-20. doi: 10.1364/OE.17.020012.

DOI:10.1364/OE.17.020012

PMID:19997225

Abstract

We report a differential splitter consisting of an asymmetric double-step multimode rib waveguide and a Y-branch splitter for in-plane photonic transduction of photonic microcantilever deflection. Arrays of photonic microcantilevers are integrated with differential splitters and an optical waveguide network to demonstrate uniformity and sensitivity of transduction. Measurement results from multiple arrays indicate a sensitivity of 0.32x10(-3) nm(-1) and minimum detectable deflection of 141 pm for a 3.5 Hz measurement bandwidth.

摘要

我们报道了一种差分分光器，它由一个非对称双台阶多模肋形波导和一个Y形分支分光器组成，用于光子微悬臂梁偏转的面内光子转换。光子微悬臂梁阵列与差分分光器和光波导网络集成在一起，以展示转换的均匀性和灵敏度。多个阵列的测量结果表明，对于3.5 Hz的测量带宽，灵敏度为0.32×10⁻³ nm⁻¹，最小可检测偏转量为141 pm。