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亚波长硅微腔

Subwavelength silicon microcavities.

作者信息

Shainline Jeffrey, Elston Stuart, Liu Zhijun, Fernandes Gustavo, Zia Rashid, Xu Jimmy

机构信息

Department of Physics, 184 Hope St., Brown University, Providence, RI 02912, USA.

出版信息

Opt Express. 2009 Dec 7;17(25):23323-31. doi: 10.1364/OE.17.023323.

DOI:10.1364/OE.17.023323
PMID:20052259
Abstract

We present a study of the first silicon microdisk resonators which are smaller than the free-space resonant wavelength in all spatial dimensions. Spectral details of whispering gallery modes with azimuthal mode number m = 4-7 are measured in microdisks with diameters between 1.35 and 1.89microm and are studied at wavelengths from 1.52 to 1.62microm. For the structures considered here, m = 5 is the highest azimuthal mode order in a subwavelength cavity and has measured Q = 1250. These results agree well with theoretical calculations using a finite difference frequency domain method and fit an exponential scaling law relating Q to disk radius via m.

摘要

我们展示了对首批硅微盘谐振器的研究,这些谐振器在所有空间维度上都小于自由空间谐振波长。在直径介于1.35至1.89微米之间的微盘中测量了方位模数m = 4 - 7的回音壁模式的光谱细节,并在波长为1.52至1.62微米的条件下进行了研究。对于此处所考虑的结构,m = 5是亚波长腔中最高的方位模阶数,并且测得品质因数Q = 1250。这些结果与使用有限差分频域方法的理论计算结果吻合良好,并且符合通过m将Q与盘半径相关联的指数缩放定律。

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