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劳埃德干涉仪应用于平面度测试。

Lloyd interferometer applied to flatness testing.

作者信息

Langenbeck P H

机构信息

Perkin-Elmer Corporation, Electrooptical Division, Norwalk, Connecticut 06852, USA.

出版信息

Appl Opt. 1967 Oct 1;6(10):1707-14. doi: 10.1364/AO.6.001707.

Abstract

Lloyd's mirror experiment is applied to testing flatness of large surfaces. Because of the grazing incidence, even rough surfaces provide the characteristic interference pattern. In the case of a perfectly flat surface, that pattern consists of narrowly and equally spaced two beam interference fringes. Departures from flatness are reflected in changes of the fringe spacing. Moiré techniques are used for visualizing and measuring these changes in the deviation from straightness of the Moiré fringes. Qualitative examples are given.

摘要

劳埃德镜实验被应用于检测大表面的平整度。由于掠入射,即使是粗糙表面也能产生特征干涉图样。在表面完全平整的情况下,该图样由间隔狭窄且相等的双光束干涉条纹组成。平整度的偏差会反映在条纹间距的变化上。莫尔技术用于可视化和测量莫尔条纹直线度偏差的这些变化。文中给出了定性示例。

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