Makosch G
Appl Opt. 1973 Sep 1;12(9):2054-6. doi: 10.1364/AO.12.002054.
An interferometric method for testing the accuracy of linear motions, such as that of drilling machines and lathe tools, is described. This method uses a diffraction grating fixed to the carriage to be tested. Only the first-order diffraction terms obtained by illuminating this grating with a laser beam are superimposed on each other by an imaging lens. An interference line pattern results that extends through the space of interfering beams and that can be analyzed with a microscope. Any deviations from the direction of motion, with the exception of deviations parallel to the grating lines, will be indicated by a movement of the fringe pattern and can be determined by counting the number of fringes passing the optical axis of the microscope. An application of this method for testing the chuck guidances in contact printing machines with a measurement accuracy of 0.2 micro is presented.
描述了一种用于测试直线运动精度的干涉测量方法，例如钻床和车床刀具的直线运动精度。该方法使用固定在待测滑架上的衍射光栅。用激光束照射该光栅所获得的一阶衍射项仅通过成像透镜相互叠加。由此产生的干涉条纹图案延伸穿过干涉光束的空间，并且可以用显微镜进行分析。除了与光栅线平行的偏差外，任何与运动方向的偏差都将由条纹图案的移动指示出来，并且可以通过计算穿过显微镜光轴的条纹数量来确定。介绍了该方法在接触式印刷机中用于测试卡盘导轨的应用，测量精度为0.2微米。
