Physikalische Chemie und Elektrochemie, Technische Universität Dresden, D-01062 Dresden, Germany.
Phys Chem Chem Phys. 2010 Feb 28;12(8):1793-803. doi: 10.1039/b922071m. Epub 2010 Jan 12.
The electrodeposition of Ta from TaF(5) was studied in three different ionic liquids, namely in 1-butyl-1-methylpyrrolidinium bis(trifluoromethyl sulfonyl) amide, 1-ethyl-3-methylimidazolium bis(trifluoromethyl sulfonyl) amide and 1-methyl-3-propyl imidazolium bis(trifluoromethyl sulfonyl) amide. The electrochemical quartz crystal microbalance (EQCM) was used together with electrochemical techniques for characterizing in situ the electrodeposition process. With the help of the EQCM we could identify the stoichiometry of the electrodeposited species. Furthermore, square-wave voltammery was used to study intermediate reduction processes in the potential regime where no mass change was detected. An XPS analysis proved the existence of elemental Ta, besides some oxides and Ta halide species. Both the ionic liquid and the deposition conditions influence strongly the quality and properties of the deposited layers.
本文研究了在三种不同的离子液体中，即 1-丁基-1-甲基吡咯烷双（三氟甲基磺酰）亚胺、1-乙基-3-甲基咪唑双（三氟甲基磺酰）亚胺和 1-甲基-3-丙基咪唑双（三氟甲基磺酰）亚胺中，从 TaF(5) 中电沉积 Ta 的过程。电化学石英晶体微天平 (EQCM) 与电化学技术一起用于原位表征电沉积过程。借助 EQCM，我们可以确定电沉积物种的化学计量比。此外，方波伏安法用于研究在没有质量变化检测到的电位范围内的中间还原过程。XPS 分析证明了除了一些氧化物和 Ta 卤化物物种外，还存在元素 Ta。离子液体和沉积条件强烈影响沉积层的质量和性能。
