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用于低频范围内小位移测量的双频激光干涉仪。

Two-frequency laser interferometer for small displacement measurements in a low frequency range.

作者信息

Ohtsuka Y, Itoh K

出版信息

Appl Opt. 1979 Jan 15;18(2):219-24. doi: 10.1364/AO.18.000219.

Abstract

A two-frequency Michelson-type interferometer is studied for small displacement measurements. The interference term is composed of the two effects due to the optical homodyne and heterodyne detection processes. The small vibration signal of concern, which is included in the amplitude of a heterodyne beat component with no phase, is obtained with A.M. detection techniques. The interferometer allows measurements of any vibrational modes of a test mirror. For a sinusoidal vibration of 2 kHz, its amplitude is measured down to 1.2 A, whereas for a vibration of rectangular mode at 0.2 Hz its minimum displacement is 2.9 A. The small time-dependent refractive index of air caused by a process similar to the photoacoustic effect is detected as another application.

摘要

研究了一种双频迈克尔逊型干涉仪用于小位移测量。干涉项由光学零差和外差检测过程产生的两种效应组成。通过调幅检测技术可获得包含在无相位外差拍频分量幅度中的相关小振动信号。该干涉仪能够测量测试镜的任何振动模式。对于2kHz的正弦振动,其幅度测量下限可达1.2 Å,而对于0.2Hz的矩形模式振动,其最小位移为2.9 Å。由类似于光声效应的过程引起的随时间变化的小空气折射率也被检测出来作为另一种应用。

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