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使用莫尔干涉测量法和数字图像处理技术测量物体表面的小倾斜角变化。

Measurements of the small tilt-angle variation of an object surface using moire interferometry and digital image processing.

作者信息

Nakano Y

出版信息

Appl Opt. 1987 Sep 15;26(18):3911-4. doi: 10.1364/AO.26.003911.

Abstract

A method of measuring the small tilt-angle variation of an object surface by using moire interferometry based on the Talbot effect and a moire technique is described. The object surface is placed in the middle of a set of two gratings. A monochromatic plane wave illuminates the first grating producing the magnified Talbot image. The moire fringe is generated by superimposing this Talbot image on the second grating. The inclination angle of the moire fringes is ameasure of the tilt angle of the object surface. The inclination angles are measured with a digital image processor.

摘要

描述了一种基于塔尔博特效应和莫尔技术,利用莫尔干涉测量物体表面微小倾斜角变化的方法。将物体表面置于一组两个光栅的中间。单色平面波照射第一个光栅产生放大的塔尔博特像。通过将此塔尔博特像与第二个光栅叠加产生莫尔条纹。莫尔条纹的倾斜角是物体表面倾斜角的一种度量。倾斜角用数字图像处理器进行测量。

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