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[大气压下石英毛细管中氩等离子体放电的光谱研究]

[Spectroscopic investigation of the argon plasma discharge in quartz capillary at atmospheric pressure].

作者信息

Huang Wen-Tong, Li Shou-Zhe, Guo Qing-Chao, Zhang Jia-Liang, Wang De-Zhen, Ma Teng-Cai

机构信息

Key Laboratory of Materials Modification by Laser, Ion and Electron Beams (Dalian University of Technology), Ministry of Education, School of Physics & Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China.

出版信息

Guang Pu Xue Yu Guang Pu Fen Xi. 2010 May;30(5):1167-70.

Abstract

An arc plasma discharge with a long length of 20 cm was generated in a quartz capillary between two hollow needle electrodes in argon at atmospheric pressure with use of the sinusoidal power supply operating at 45 kHz, which was characterized by a very high electron density. The spectroscopic method of optical emission was employed to diagnose the characteristic parameters of the arc plasma discharge in the quartz capillary. The gas temperature was determined by simulating the OH A-X(0, 0) vibrational band around 300 nm and comparison with measured spectrum by means of optical emission spectroscopy. Furthermore, the electron density was measured by means of Stark broadening of the profile of Hbeta at 486.1 nm. The electron temperature was determined using a Boltzmann plot method. The experiment results show that in the argon arc plasma discharge generated in the quartz capillary at atmospheric pressure, the gas temperature of plasma is about (1 100 +/- 50)K, the electron density at the gas temperature of 1 100 K is approximately 10(14) cm(-3), and the corresponding electron temperature is (14 515 +/- 500)K. This work has accumulated some significant experimental parameters for the treatment of inner surface of large length-to-radius-ratio insulated dielectric tube using plasma, and the results are of great importance to the applications of this type of atmospheric-pressure plasma discharge.

摘要

在大气压下的氩气中,使用工作频率为45kHz的正弦电源,在两根空心针状电极之间的石英毛细管中产生了长度为20cm的电弧等离子体放电,其特征是具有非常高的电子密度。采用光发射光谱法诊断石英毛细管中电弧等离子体放电的特征参数。通过模拟300nm附近的OH A-X(0, 0)振动带并与光发射光谱法测量的光谱进行比较来确定气体温度。此外,通过测量486.1nm处Hβ谱线的斯塔克展宽来测量电子密度。使用玻尔兹曼绘图法确定电子温度。实验结果表明,在大气压下石英毛细管中产生的氩弧等离子体放电中,等离子体的气体温度约为(1100±50)K,气体温度为1100K时的电子密度约为10¹⁴cm⁻³,相应的电子温度为(14515±500)K。这项工作积累了一些重要的实验参数,用于利用等离子体处理大长径比绝缘介质管的内表面,研究结果对于此类大气压等离子体放电的应用具有重要意义。

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