Widjonarko N Edwin, Perkins John D, Leisch Jennifer E, Parilla Philip A, Curtis Calvin J, Ginley David S, Berry Joseph J
Department of Physics, 390 UCB, University of Colorado, Boulder, Colorado 80309-0390, USA.
Rev Sci Instrum. 2010 Jul;81(7):073103. doi: 10.1063/1.3455218.
Laser-induced breakdown spectroscopy (LIBS) is a recently developed locally destructive elemental analysis technique that can be used to analyze solid, liquid, and gaseous samples. In the system explored here, a neodymium-doped yttrium aluminum garnet laser ablates a small amount of the sample and spectral emission from the plume is analyzed using a set of synchronized spectrometers. We explore the use of LIBS to map the stoichiometry of compositionally graded amorphous indium zinc oxide thin-film libraries. After optimization of the experimental parameters (distance between lens and samples, spot size on the samples, etc.), the LIBS system was calibrated against inductively coupled plasma atomic emission spectroscopy which resulted in a very consistent LIBS-based elemental analysis. Various parameters that need to be watched closely in order to produce consistent results are discussed. We also compare LIBS and x-ray fluorescence as techniques for the compositional mapping of libraries.
激光诱导击穿光谱法（LIBS）是一种最近开发的局部破坏性元素分析技术，可用于分析固体、液体和气体样品。在此所探索的系统中，掺钕钇铝石榴石激光烧蚀少量样品，并使用一组同步光谱仪分析羽状物的光谱发射。我们探索使用LIBS来绘制成分渐变的非晶铟锌氧化物薄膜库的化学计量图。在优化实验参数（透镜与样品之间的距离、样品上的光斑尺寸等）之后，LIBS系统针对电感耦合等离子体原子发射光谱法进行了校准，从而实现了基于LIBS的非常一致的元素分析。讨论了为产生一致结果而需要密切关注的各种参数。我们还比较了LIBS和X射线荧光作为库成分映射技术。
