Fused-silica focusing lens for deep UV laser processing.
作者信息
Hung T Y, Su C S
出版信息
Appl Opt. 1992 Aug 1;31(22):4397-404. doi: 10.1364/AO.31.004397.
PMID:20725434
Abstract
A simple four-element fused-silica lens is presented that has a focal length of 31.2 mm and a relative aperture of f/1 for use as a focusing lens for deep UV laser processing. The curvature of the lens is designed with a practical design method to match the curvature of existing optical tools. By applying an 8.5-mm beam diameter Nd:YAG laser at a wavelength of 266 nm through the lens, we can easily achieve the percussion drilled into samples of 25-microm-thick tantalum foil with a hole diameter of <6 microm. When the lens and/or the sample is tilted, the shape of the drilled hole is in agreement with the Gaussian beam spot simulation.
摘要
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